1 Experienced Researcher (ER, 2 years) and 1 Early-Stage-Researcher (ESR, 3 years)

Inverse electromagnetic scattering from nanometer-sized lithographic features: nanometrology (EU Marie-Curie project SPAM)

The research project is related to the measurement of the nanometer-sized features that are produced in the optical lithographic process steps during the production of the newest- and future-generation silicon devices. The measurement and control of the actual 45-nanometer features and the future smaller ones ask for fast and reliable optical methods that are based on the far-field measurement of the scattered light over a broad range of wavelengths. An inverse electromagnetic scattering model should allow the reconstruction of the scattering features with the required nanometer accuracy. The project focuses on both the theoretical and experimental aspects of the scattering problem and will start at the Optics Research Group in Delft. The set-up of the final on-line measurement method and the field tests will be carried out at the clean-room facilities of ASM Lithography in Veldhoven, The Netherlands. The particular research described in this advertisement is part of a larger European Marie-Curie Traning and Mobility project, called SPAM, with the Dutch company ASM-Lithography as the coordinator. The acronym SPAM stands for Supra-disciplinary approach to research and training in surface Physics for Advanced Manufacturing and addresses four advanced physics research themes that are of vital importance for realising future-generation optical lithography equipment for the  semiconductor industry. ASML is the world leader in optical lithographic equipment with a market share of 60% in wafer steppers for the Integrated-Circuit industry and employing some seven thousand persons worldwide. The junior researcher and the experienced researcher with their main location at Delft University will be part of an EU training and mobility program comprising some 20 fellow researchers and participate in teaching sessions, workshops, exchange visits and longer visits to other research centers that are part of the SPAM-consortium.

Requirements

Applicants should preferably have the nationality of an EU member state or of an EU-associated state (but not the Dutch nationality) and they should have a background in physics. Knowledge of geometrical and/or physical optics is recommended. Delft University of Technology is a bilingual organisation. A good command of English (written and spoken) is essential, while a good command of Dutch is also preferred.

Conditions of employment

The employement conditions for ESR and ER researchers within the EU Marie Curie program can be found on the EU-website http://ec.europa.eu/research/fp7/index_en.cfm. A base salary will be offered together with the EU allowances for mobility and training. The successful candidates will be employed by TU Delft. TU Delft strives to increase the number of women in higher academic positions; women are thus especially encouraged to apply.

Information and application

For further details on the position you are welcome to contact Prof. H.P. Urbach, phone: +31 (0) 15 – 27 86146 or: +31 (0)15 – 27 81444, e-mail: h.p.urbach at tudelft.nl or Dr. S.F. Pereira, phone: +31 (0) 2782474, e-mail: s.f.pereira@tudelft.nl  
To apply, please send a detailed CV together with a letter of motivation to Delft University of Technology, Faculty of Applied Sciences, attn. Prof. H.P. Urbach, Lorentzweg 1, 2628 CJ Delft, The Netherlands; or apply online to: h.p. urbach at tudelft.nl.